Ultrahigh Resolution Field Emission SEM

The JEOL IT810 Ultrahigh Resolution Field Emission SEM is a revolutionary FE-SEM with the most advanced high-resolution analytical technology available today. Versatility and high spatial resolution meet automation and ease of use with the JSM-IT810 series FE SEM. The JEOL IT810 series offers the next level of analytical intelligence for high spatial resolution imaging and analysis at the nanoscale.

JSM-IT810 Series Ultrahigh Resolution Field Emission SEM

Smart-Flexible-Powerful

Smart - The IT810 series of Schottky Field Emission SEMs with embedded JEOL Energy Dispersive X-ray Spectrometers (EDS) streamlines operation and workflow efficiency. Elegant functionality, ultrahigh resolution, and powerful software with automation enable seamless acquisition of data from observation to elemental analysis and subsequent reporting.

The JEOL NEOENGINE® electron beam control system and advanced auto functions provide fast transitions between high resolution imaging and high current analyses, without sacrificing performance, resulting in unprecedented ease of use. Advanced algorithms optimize control of electron lenses in real time, correct electron trajectories and automatically align the beam, and correct the focus, brightness/contrast, and astigmatism. JEOL’s Live EDS analysis allows direct monitoring of specimen chemical composition during imaging.

The JEOL SEM seamlessly integrates optical imaging and navigation, SEM imaging, and EDS Live analysis and mapping with one-click operation.

The JEOL SEM seamlessly integrates optical imaging and navigation, SEM imaging, and EDS Live analysis and mapping with one-click operation.

Flexible - The JSM-IT810 series is equipped with a large specimen chamber that accommodates a wide variety of detectors simultaneously, including: multiple EDS, WDS, EBSD, STEM, BSE, and CL. JEOL’s GatherX windowless EDS detector is ideal for higher sensitivity and spatial resolution with lower energy x-ray detection down to Li. JEOL’s unique Soft X-ray Emission Spectrometer (SXES) allows efficient and parallel collection of very low-energy X-rays while providing unprecedented chemical state analysis.

Powerful - The IT810 is JEOL’s flagship FE SEM with up to 2,000,000X magnification and an accelerating voltage range of 0.01 to 30kV, making it possible to acquire stunning details of nanostructures and comprehensive analysis. This highly versatile, easy-to-use field emission SEM offers the next level of analytical intelligence in FE-SEM.

Innovative No-code Automation

The intuitive and customizable software interface makes it very easy to achieve high throughput in everyday observation and analysis, including new no code automated workflows which come standard with every IT810 series microscope.

NeoAction:
New no code automation workflows allow a novice user to set up a series of images and analyses to be completed without user intervention. Imaging and analysis can be completed with multiple beam and scan settings, stage coordinates, and detectors.

Montage:
Automated imaging and analysis of large areas including stitching together large canvases.

Innovative No-code Automation

Key Features

  • Versatile electromagnetic/electrostatic hybrid lens design for outstanding imaging and analysis performance
  • NEOENGINE – intelligent automated electron beam control
  • Advanced auto functions including beam alignment, focus, and stigmation
  • In-lens field emission gun
  • Aperture Angle Control Lens (ACL) for superb resolution at any kV or probe current
  • Beam Deceleration (BD) mode reduces effects of lens aberrations 
  • Large specimen chamber with multiple ports
  • Montage imaging feature comes standard
  • Smile View Lab for data management and report generation
  • Live Analysis with integrated JEOL EDS elemental screening
  • High spatial resolution imaging and analysis of nanostructures

Application Notes

Request JSM-IT810 Product Info / Virtual Demo

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