| Maximum power |
10 kW (1A at 10 kV) |
| Accelerating voltage range |
-4 to -10 kV |
| Beam deflection angle |
270° (permanent magnet and electromagnet used) |
| XY scan width |
Maximum 50 mm in diameter (at -6 kV) |
| XY movement |
Maximum 50 mm in diameter (at -6 kV) |
| Scan frequency |
X: 50 Hz; Y: 500 Hz |
| Working pressure |
7.0x10-2 to 5.0x10-5 Pa |
| Cooling water |
5 to 8 lit/min (temeperature 10 to 25°C)
Differential pressure: 0.15 to 0.3 MPa |
| Outer dimensions |
177(W) x 284(D) x 140(H) mm |
| Weight |
Approx. 14kg |
| Applicable power supplies |
JST-3F, JST-10F, JST-16F |
Please Note: Not all JEOL Industrial Equipment products are available in every country. For specific information and more details about JEOL products available in your area, contact the IE International Business Office at sales-ieg@jeol.co.jp. Thank you.