Rotary Sensors are original products by JEOL. This Rotary Sensor is used for crystal oscillation type film thickness controller and used to monitor a deposition rate and film thickness in a vacuum depositon process. 6 or 12 crystals are incorporated in the head of the Rotary Sensor. When a crystal failure occurs, the crystal moves automatically and enable continuous evaporation process by using new crystal. The detection hole is in a fixed position, so there is no need to change the value of tooling factor each time a crystal is moved. It is useful for long-time and thick or multi films coating process. We have 2 types of sensor head, 180° (flat) type and 45° type.
| (A) Rotary Sensor head |
(B) Rotary Sensor (Body) |
(C) Electromagnetic valve kit |
| Spec |
Model |
Length * |
Model |
Spec |
Model |
180°
(Flat) |
BS-04120SSH |
200 mm |
BS-04010SSR |
5V |
BS-04160KIT |
| 300 mm |
BS-04020SSR |
| 350 mm |
BS-04030SSR |
| 400 mm |
BS-04040SSR |
| 450 mm |
BS-04050SSR |
| 480 mm |
BS-04060SSR |
| 45° |
BS-04130SSH |
500 mm |
BS-04070SSR |
24V |
BS-04170KT |
| 540 mm |
BS-04080SSR |
| 545 mm |
BS-04090SSR |
| 580 mm |
BS-04100SSR |
| 650 mm |
BS-04110SSR |
| |
|
|
* Length part, including sensor head, is inserted into the vacuum chamber
|
Select in the form of A + B + C
| Rotary Sensor head (180°) |
+ |
Rotary Sensor (200mm) |
+ |
Electromagnetic valve kit (5V) |
| BS-04120SSH |
BS-04010SSR |
BS-04160KIT |
As for 12 sensors, please contact us.
Please Note: Not all JEOL Industrial Equipment products are available in every country. For specific information and more details about JEOL products available in your area, contact the IE International Business Office at sales-ieg@jeol.co.jp. Thank you.