JAMP-9510F Field Emission Auger Microprobe

JAMP-9510F Field Emission Auger Microprobe

The JAMP-9510F Field Emission Auger Microprobe offers the highest spatial resolution available in an Auger microprobe: (min. probe diameter of 3nm SEI; 8nm for Auger analysis). Employing a low-aberration condenser lens (in which an electrostatic field and a magnetic field are superposed), combined with a patented "in-lens' Schottky field emission gun, the JAMP-9510F obtains very small spot sizes with beam currents up to 200nA.

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Key Features

Spectrum imaging

Each pixel contains spectrum
Each pixel contains spectrum
Elemental distributions extracted from a spectrum image data cube
Elemental distributions extracted
from a spectrum image data cube
A newly developed hyperspectral mapping method enables creation of elemental maps from full spectral data cubes. In conventional Auger mapping, users are required to specify elements in advance, potentially resulting in incomplete data sets. By employing a hyperspectral technique similar to EDS, Auger maps can now be created for any element. Simply select the measured energy range and resolution or use wide spectrum acquisition to create the hyperspectral data set. Hyperspectral imaging can be applied to both elemental analysis and reflection electron energy loss (REELS) analysis.

Standard spectra database & peak deconvolution software

Standard spectra of pure Sn, SnO and SnO2
Standard spectra of pure Sn, SnO and SnO2
Chemical-state resolved depth profile of the solder surface
Chemical-state resolved depth profile of the solder surface
Standard spectra and built-in peak deconvolution software enable complex chemical state analysis with a single click. Our standard spectra database includes more than 500 spectra for 140 materials.

Specifications

Electron illumination system
SEI resolution 3nm（at 25kV, 10pA）
Probe diameter for Auger analysis 8nm（at 25kV, 1nA）
Electron gun Schottky field emission gun
Accelerating voltage 0.5 to 30kV
Probe current 10-11 to 2×10-7A
Magnification x 25 to 500,000
Auger analysis system
Analyzer Electrostatic hemispherical analyzer (HSA)
Energy resolution（ΔE/E） 0.05 to 0.6%
Sensitivity 840,000 cps/7 ch or more
(at 10 kV 10 nA Cu-LMN, 0.6% resolution, 60tilt)

Expandability

Additional ports to accommodate the following attachments are provided, supporting a variety of analyses.
  • Specimen Parking Unit
  • Specimen Cooling and Fracturing Device
  • Backscattered Electron Detector
  • Energy Dispersive X-ray Spectrometer (EDS)
  • Transfer Vessel

Application

Semiconductor devices

Elemental distributions and chemical state mapping of silicon of a cross-section of a semiconductor device, acquired by spectrum imaging.
Elemental distributions and chemical state mapping of silicon of a cross-section of a semiconductor device,
acquired by spectrum imaging.
AES offers outstanding spatial resolution for characterizing sub-100 nm features, especially compared to other X-ray emission spectroscopy techniques like SEM-EDS and EPMA. The high spectral resolution of this technique also enables chemical state analysis, including chemical state mapping.

Lithium-ion battery (LIB) materials

Standard spectra of Li KVV in the differential form
Standard spectra of Li KVV in the differential form
Cross-section elemental mapping for a LIB anode material
Cross-section elemental mapping for a LIB anode material
Lithium detection sensitivity of AES is high and often used for analysis of lithium-ion battery materials. AES detects lithium peaks from lithium oxides and lithium carbonate with good sensitivity because electrons at the adjacent atoms get involved in the auger process. Lithium mapping can be performed easily with spectrum imaging.

REELS analysis

Loss spectra of carbon materials
Loss spectra of carbon materials
Carbon distribution obtained by AES analysis (left) and graphite distribution by REELS analysis (right) for a graphene sample on a copper plate
Carbon distribution obtained by AES analysis (left) and graphite distribution by REELS analysis (right) for a graphene sample on a copper plate
Reflection electron energy loss spectroscopy (REELS) is also an important application of Auger microprobe. REELS is applied to analysis of carbon materials and also to evaluation of the bandgap size of wide-bandgap semiconductors and insulators.

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