Electron Optic Documents

SEM manufacturers can choose different output sizes for their images, making magnification a very deceptive number when comparing SEM micrographs from different SEM manufacturers. Because of this fact, the best way to compare images is to compare the length of the micron bar or field of view.

There are a number of applications where scientists and engineers are faced with air or moisture sensitive samples that require imaging and analysis using a scanning electron microscope (SEM). Applications include: components in rechargeable batteries, fuel cells, and catalysts among others. Any exposure to oxygen or moisture in the air can completely alter or destroy the structure of these highly reactive materials. JEOL has built a special air-lock system that can handle the transfer of air-sensitive specimens to be imaged in the SEM without atmospheric exposure.

JEOL now offers both simple and advanced automation solutions, giving users the capability to develop protocols that fit their exact imaging needs. When paired with best-in- class AI-driven auto-function technology (auto focus, auto astigmatism correction, auto brightness/contrast), JEOL’s automation solutions are fast, reliable, reproducible, and applicable to a wide range of applications.

Scanning electron microscopes (SEM) coupled with an energy dispersive X-ray detector (EDS) are used extensively to provide insight into a sample’s chemical makeup. This SEM-EDS technique can provide information on the elements present, their relative concentrations and spatial distribution over very small volumes (micron and some instances nanometer scale).

The holy grail of nanoscale analysis with EDS is to quickly analyze any features which can be imaged in the SEM. However, for nanoscale features this is complicated by that fact that X-ray spatial resolution is typically larger than SEM imaging resolution. Figure 1 shows EDS maps from an integrated circuit cross section at 15kV and 6kV using a W SEM and an FE SEM, as well as the approximate X-ray signal depths at those voltages.

The JSM-IT200LA SEM delivers the ultimate user experience for high through- put imaging and elemental analysis. An embedded color camera simplifies specimen navigation, advanced automation delivers crisp secondary and backscatter images in seconds, and Real-Time (Live) EDS provides instant feedback of the specimen composition for intuitive operation at any experi- ence level. This All-in-One SEM also includes high and low vacuum modes for observation of a wide range of specimen types without compromise. All of this is delivered at a great value.

Cryo-SEM imaging is a powerful tool in studying the structures of electron beam and vacuum sensitive materials. These materials include: fragile biological structures such as fungi, plants, cells, etc. as well as soft or volatile samples and even liquids. Cryo-SEM offers some clear advantages by rapidly freezing a sample prior to imaging, thus maintaining the sample as close as possible to its natural state. Long dehydration and chemical fixation steps can be avoided. Inhibiting dehydration helps maintain delicate structures without shrinkage. Moreover, volatile or even liquid samples are stabilized under the electron beam. Cryo fracturing techniques allow for study of the internal microstructure of these types of vulnerable materials as well.

Utilizing Monte Carlo Modeling of electron trajectories Electron Flight Simulator is a software tool designed to make your job easier. It can help you understand difficult samples, show the best way to run an analysis, and help explain results to others. With it you can see how the electron beam penetrates your sample, and where the X-ray signal comes from, for a wide variety of microscope conditions. You can model multiple layers, particles, defects, inclusions, and cross-sections. Any sample chemistry can be modeled.

The JEOL Environmental Airlock system allows for the simple transfer of reactive specimens to the SEM without being exposed to air. For specimens where any exposure to air or moisture can alter or destroy the structure, this system provides a cost effective and simple method to bring specimens from a glove box directly to the SEM.

JEOL SEMs are delivered with the capability for remote viewing and remote operation. The SEM computer includes a 2nd ethernet card for connection to your local area network. There is no need for a second support computer. Just connect your JEOL SEM computer to a reliable and fast broadband internet connection and choose the software platform that meets your remote access requirements.