System Outline
Applicable models:
Field Emission Scanning Electron Microscope
Electron Probe Microanalyzer (EPMA)
Data acquisition and intuitive observation with the use of color
By adding visible light color information from the optical microscope image (which cannot be obtained with the SEM image) it provides an SEM image with a more intuitive visual effect.
Smooth target search takes advantage of the features of the optical microscope
Performing observation with the optical microscope makes it possible to easily find the target structures, which are difficult to distinguish using SEM images.
Prevents damage to the specimen from the electron beam
To prevent damage or contamination from the electron beam, finding the area of interest is first performed using the optical microscope. This enables SEM observation with minimal radiation dose to the observation site.
Applicable models: JXA-8230, JXA-8530F, JXA-8530FPlus
"miXcroscopy™ for EPMA" - Rapid registration of analysis positions
miXcroscopy™ for EPMA rapidly determines analysis positions for specimens that are difficult to distinguish elements from the backscattered electron image, by installation of polarized light microscope.
Specimen: Mineral thin section
Polarized light OM image: Mag. x50
Backscattered electron image: Mag. x50
"miXcroscopy™ for EPMA" - Precise, fast analysis of OM-registered positions
Conventional flow
New flow using miXcroscopy™ for EPMA
miXcroscopy™ for EPMA enables efficient task separation of OM and EPMA. OM searches analysis areas and registers analysis points. EPMA performs elemental analysis. This drastic improvement greatly increases EPMA analysis time.